UVISEL
Horiba
The UVISEL spectroscopic ellipsometer is capable of the widest spectral characterization of your thin film sample.

The UVISEL is based upon a measurement principle without any moving parts. The polarization modulation is accomplished by the use of a photo-elastic device. There are several versions of the apparatus, which are each geared toward a specific wavelength region of interest. It is possible to configure a UVISEL such that the complete spectral range between 190 and 2100 nm is covered. The DeltaPsi2 software that accompanies these ellipsometers is the interface to these ellipsometers and incorporates powerful analysis routines to enable you to do complex analysis on the data.

High End Research Ellipsometer:
  • Spectroscopic Phase Modulated Ellipsometer
  • Highest precision and sensitivity
  • Wide spectral range : 140 to 2100 nm
  • Modular design
  • Fully integrated spectroscopic ellipsometry software package
uvisel.pdf
  Spectroscopy    

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