Ellipsometry provides highly accurate measurements of material and thin film optical and structural properties. The technique is non destructive and is used to characterize single layers and multilayer structures by making measurements across a range of light energies and angles of incidence. A spectroscopy ellipsometer instrument provides this capability.

Horiba Jobin Yvon ellipsometers are unique in that they combine phase modulation with a numerical data acquisition and processing system, so there are no mechanically moving parts. This technology also provides more information than classical ellipsometer systems allowing a wider range and more complex samples to be characterized.